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ELECTRICAL PROPERTIES OF THIN POLYIMIDE FILMS PREPARED BY IONIZED CLUSTER BEAM DEPOSITION

著者名:
掲載資料名:
Materials science of high temperature polymers for microelectronics : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
227
発行年:
1991
開始ページ:
225
終了ページ:
230
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991217 [1558991212]
言語:
英語
請求記号:
M23500/227
資料種別:
国際会議録

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