Blank Cover Image

INVESTIGATIONS OF RESIDUAL CHLORINE ON ETCHED AlCu METAL LINES BY TOTAL REFLECTION X-RAY FLUORESCENCE (TXRF)

著者名:
掲載資料名:
Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
225
発行年:
1991
開始ページ:
329
終了ページ:
334
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991194 [1558991190]
言語:
英語
請求記号:
M23500/225
資料種別:
国際会議録

類似資料:

1 国際会議録 TOTAL REFLECTION X-RAY FLUORESCENCE (TXRF)

Hockett, R. S.

MRS - Materials Research Society
7 国際会議録 Total internal reflection fluorescence spectroscopy for probing porphyrin fluorescence in cell membranes

Sailer,R., Straub,W.S.L., Gschwend,M.H., Steiner,R.W., Schneckenburger,H.

SPIE-The International Society for Optical Engineering
2 国際会議録 TXRF REFERENCE STANDARDS: A DISCUSSION

Hockett, R.S.

Electrochemical Society
8 国際会議録 Examination of total reflection x-ray fluorescence spectroscopy (TXRF) as a tool for contamination control and selection of appropriate values of important …

Hellin

Electrochemical Society
3 国際会議録 SURFACE CONTAMINATION LEVEL OF GaAs WAFERS TREATED WITH SOLUTIONS OF ORGANIC BASE MEASURED BY TOTAL REFLECTION X-RAY FLUORESCENCE (TXRF)

Shibaya, H., Kondo, H., Tomizawa, K.

Materials Research Society
9 国際会議録 Sensitivity enhancement of transducers for total internal reflection fluorescence

Klotz,A., Barzen,C., Brecht,A, Harris,R.D., Quigley,G.R, Wilkinson,J.S., Gauglitz,G.

SPIE - The International Society for Optical Engineering
4 国際会議録 TXRF CHARACTERIZATION OF TRACE METAL CONTAMINATION IN THIN GATE OXIDES .

Hockett, R.S., Hymes, Diane

Materials Research Society
10 国際会議録 ION IMPLANTED CALIBRATION STANDARDS FOR Si SURFACE CONTAMINATION DETECTION BY TXRF

Jacobson, D. C., Poate, J. M., Higashi, G. S., Boone, T., Eaglesham, D. J., Hockett, Richard

MRS - Materials Research Society
5 国際会議録 CHARACTERIZATION OF HEAVY METAL CONTAMINATION IN DIAMOND FILMS USING MIMS, TXRF, AND RBS

Hockett, R.S., Knowles, James

Materials Research Society
11 国際会議録 Time-resolved total internal reflection fluorescence spectroscopy: application to the membrane marker laurdan

Schneckenburger,H., Stock,K., Eickholz,J., Strauss,W.S.L., Lyttek,M., Sailer,R.

SPIE-The International Society for Optical Engineering
6 国際会議録 Use and function of TXRF(total reflection x-ray fluorescence)for routine in fab metallic monitoring

Allen,M., Hossain,T.Z., Lebowitz,J.

SPIE - The International Society for Optical Engineering
12 国際会議録 Determination of subsurface tumor localization in animal models with near-infrared (NIR) fluorescence imaging

Chen, Y., Blessington, D.M., Zhang, Z., Liu, Q., Zhou, L., Mu, C., Intes, X., Achilefu, S.I., Li, H., Zhang, M.Z., …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12