IN-SITU CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY LOW TEMPERATURE MULTI-STEP RAPID THERMAL ANNEALING PROCESS
- 著者名:
- 掲載資料名:
- Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 224
- 発行年:
- 1991
- 開始ページ:
- 347
- 終了ページ:
- 354
- 総ページ数:
- 8
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991187 [1558991182]
- 言語:
- 英語
- 請求記号:
- M23500/224
- 資料種別:
- 国際会議録
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LOW-RESISTIVITY AMORPHOUS SILICON FOR CONTACTS USING LOW-TEMPERATURE RAPID THERMAL ANNEALING
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