PLASMA IMMERSION SURFACE MODIFICATION WITH METAL ION PLASMA
- 著者名:
- 掲載資料名:
- Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 223
- 発行年:
- 1991
- 開始ページ:
- 371
- 終了ページ:
- 376
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991170 [1558991174]
- 言語:
- 英語
- 請求記号:
- M23500/223
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
4
国際会議録
SELECTIVE COPPER PLATING IN SILICON DIOXIDE TRENCHES WITH METAL PLASMA IMMERSION ION IMPLANTATION
Materials Research Society |
Kluwer Academic Publishers |
Materials Research Society |
Kluwer Academic Publishers |
6
国際会議録
New Developments in Metal Ion Implantation by Vacuum Arc Ion Sources and Metal Plasma Immersion
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |