THE EFFECTS OF ION ENERGY ON CARBON AND TUNGSTEN FILMS FABRICATED BY DIRECT ION BEAM DEPOSITION AND ION BEAM SPUTTERING DEPOSITION
- 著者名:
Kataoka, I. Ito, K. Hoshi, N. Yonemitsu, T. Etoh, K. Yamada, I. Delaunay, Jean-Jacques - 掲載資料名:
- Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 223
- 発行年:
- 1991
- 開始ページ:
- 359
- 終了ページ:
- 364
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991170 [1558991174]
- 言語:
- 英語
- 請求記号:
- M23500/223
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
INVESTIGATION OF OXIDE/METAL MULTILAYERS FOR SOFT X-RAY OPTICS FABRICATED BY ION BEAM SPUTTERING
Materials Research Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Trans Tech Publications |
Materials Research Society |
6
国際会議録
Fabrication of ZnO bridging nanowire device by a single-step chemical vapor deposition method
Materials Research Society |
Materials Research Society |