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NUMERICAL SIMULATION OF SCANNING SPEED AND SUPERCOOLING EFFECTS DURING ZONE-MELTING-RECRYSTALLIZATION OF SOI WAFERS

著者名:
掲載資料名:
Kinetics of phase transformations : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
205
発行年:
1992
開始ページ:
453
終了ページ:
458
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990975 [1558990976]
言語:
英語
請求記号:
M23500/205
資料種別:
国際会議録

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