Blank Cover Image

ASSESSMENT OF SURFACE DAMAGE OF GALLIUM ARSENIDE DUE TO REACTIVE ION ETCHING

著者名:
Puttock, M. S.
Thomas, H.
Morgan, D. V.
Rossow, U.
Zahn, D. R. T.
Richter, W.
Hilton, K. P.
Woodward, J.
さらに 3 件
掲載資料名:
Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
190
発行年:
1991
開始ページ:
255
終了ページ:
260
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990791 [1558990798]
言語:
英語
請求記号:
M23500/190
資料種別:
国際会議録

類似資料:

Karouta, F., Jacobs, B., Moerman, I., Jacobs, K., Weyher, J. L., Porowski, S., Crane, R., Hageman, P. R.

MRS-Materials Research Society

Park, H.-H., Kwon, K.-H., Lee, S.-H., Nahm, S., Lee, J.-W., Koak, B.-H., Suh, K.-S., Kwon, O.-J., Lee, J.-L., Yeom, …

MRS - Materials Research Society

McLane, G., Meyyappan, M., Cole, M. W., Lee, H. S., Lareau, R., Namaroff, M., Sasserath, J.

Materials Research Society

Sadana, D. K., de Souza, J. P., Rutz, R. F., Cardone, F., Norcott, M. H.

Materials Research Society

Puttock, M., Iacopi, A., Powell, G., Clausen, M., Bennett, R.

Electrochemical Society

Feng, G. F., Holtz, M., Zallen, R., Epp. J. M., Dillard, J. G., Cole, E., Johnson, P., Sen, S., Burton, L. C.

Materials Research Society

Blewitt, D.N., McFarlane, K., Prothero, A., Puttock, J. S., Rees, F.J., Roberts, P.T., Witlox, H.W.M.

American Institute of Chemical Engineers

Ng, H.Y., Klaus, D.P., Polcan, M.R., Molzen, W.W.

Materials Research Society

Takai, M., Tokuda, J., Nakai, H., Gamo, K., Namba, S.

North-Holland

Aebi, V. W., Costello, K. A., Edgecumbe, J. P., Boyle, J. J., Robbins, W. L., Bell, R., Burt, D., Harris, A., Palmer, …

SPIE - The International Society of Optical Engineering

Au,H.L., Ling,C.C., Lee,T.C., Beling,C.D., Fung,S.

Trans Tech Publications

Awadelkarim, O.O., Gu, T., Mikulan, P.I., Fonash, S.J., Reinhardt, K., Chan, Y.D.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12