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NON-DESTRUCTIVE ASSESSMENT OF THIN FILM STRESSES AND CRYSTAL QUALITY OF SILICON ON INSULATOR MATERIALS WITH RAMAN SPECTROSCOPY

著者名:
掲載資料名:
Thin films : stresses and mechanical properties II : symposium held April 16-19, 1990, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
188
発行年:
1990
開始ページ:
53
終了ページ:
60
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990777 [1558990771]
言語:
英語
請求記号:
M23500/188
資料種別:
国際会議録

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