EFFECT OF THE MOS PROCESS ON THE WORK-FUNCTION DIFFERENCE BETWEEN THE POLYSILICON GATES AND THE SILICON SUBSTRATE
- 著者名:
- Lifshitz, N.
- 掲載資料名:
- Polysilicon thin films and interfaces
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 182
- 発行年:
- 1990
- 開始ページ:
- 305
- 終了ページ:
- 314
- 総ページ数:
- 10
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990715 [1558990712]
- 言語:
- 英語
- 請求記号:
- M23500/182
- 資料種別:
- 国際会議録
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12
国際会議録
POST-ANNEALING EFFECT ON THE RELIABILITY OF ULTRA-THIN SILICON DIOXIDE WITH POLYSILICON GATE
Materials Research Society |