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SUPERSATURATED p-TYPE POLYCRYSTALLINE FILMS PRODUCED BY RAPID THERMAL ANNEALING OF HIGH DOSE BORON ION IMPLANTS FOR INTERCONNECTS AND SHALLOW JUNCTION DIFFUSION SOURCES

著者名:
Raicu, B.
Current, M. I.
Keenan, W. A.
Mordo, D.
Brennan, R.
Holzworth, R.
さらに 1 件
掲載資料名:
Polysilicon thin films and interfaces
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
182
発行年:
1990
開始ページ:
153
終了ページ:
158
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990715 [1558990712]
言語:
英語
請求記号:
M23500/182
資料種別:
国際会議録

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