TME EFFECTS OF Si ADDITION ON THE PROPERTIES OF AlCu FILMS USED IN MULTILEVEL METAL SYSTEMS
- 著者名:
- 掲載資料名:
- Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 181
- 発行年:
- 1990
- 開始ページ:
- 545
- 終了ページ:
- 548
- 総ページ数:
- 4
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990708 [1558990704]
- 言語:
- 英語
- 請求記号:
- M23500/181
- 資料種別:
- 国際会議録
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