PROCESS DESIGN FOR NON-ALLOYED CONTACTS TO InP-BASED LASER DEVICES

PROCESS DESIGN FOR NON-ALLOYED CONTACTS TO InP-BASED LASER DEVICES

著者名:

Katz, A.

Dautremont-Smith, W. C.

掲載資料名:

Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

181

発行年:

1990

開始ページ:

401

終了ページ:

410

総ページ数:

10

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990708 [1558990704]

言語:

英語

請求記号:

M23500/181

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015665
シリーズID:	PA00000011
会議名:	Symposium on advanced metallizations in microelectronics
回次:	1990
会議開催地:	San Francisco, CA, USA
会議開催年:	1990.04.16-1990.04.20

類似資料:

1 国際会議録 Pt/Ti LOW RESISTANCE NON-ALLYED OHMIC CONTACTS TO InP-BASED PHOTONIC DEVICES Katz, A., Chu, S. N. G., Thomas, P. M, Dautremont-Smith, W. C. Materials Research Society	7 国際会議録 SUSCEPTOR AND PROXIMITY RAPID THERMAL ANNEALING OF InP Katz, A., Pearton, S. J., Geva, M. Materials Research Society
2 国際会議録 MICROSTRUCTURE, STRESS AND ELECTRICAL PROPERTIES OF THE HIGHLY STABLE W/p+-In0.53Ga0.47As OHMIC CONTACTS Katz, A., Maher, D., Thomas, P.M., Weir, B.E., Dautremont-Smith, W.C., Kimerling, L.C. Materials Research Society	8 国際会議録 *ANOTHER STEP IN DEVELOPING A SINGLE WAFER INTEGRATED PROCESS: RAPID THERMAL LOW PRESSURE METALORGANIC CHEMICAL VAPOR DEPOSITION OF LOCAL DIFFUSED W(Zn) … Katz, A., Feingold, A., El-Roy, A., Moriya, N., Pearton, S.J., Rusby, A., Kovalchick, J., Abernathy, C.R., Geva, M., … Materials Research Society
3 国際会議録 *INTERFACIAL MICROSTRUCTURE AND CARRIER CONDUCTION PROCESS IN Pt/Ti OHMIC CONTACT TO p-In0.53Ga0.47As FORMED BY RAPID THERMAL PROCESSING Chu, S. N. G., Katz, A., Boone, T., Thomas, P. M., Riggs, V. G., Dautremont-Smith, W. C., Johnson Jr., W. D. Materials Research Society	9 国際会議録 METALIZATION SYSTEMS FOR BONDING OF InP LASER DIODES TO CVD-DIAMOND SUBMOUNTS Katz, A., Wang, K.-W., Baiocchi, F. A., Dautremont-Smith, W. C., Lane, E., Lee, C.-H, Wong, Y-M., Tai, K.L., Bacon, D.. … Materials Research Society
4 国際会議録 *FORMATION OF OHMIC CONTACTS TO InP BY MEANS OF RAPID THERMAL LOW PRESSURE (METALORGANIC) CHEMICAL VAPOR DEPOSITION (RT-LPMOCVD) TECHNIQUE Katz, A., Feingold, A., Pearton, S. J., Nakahara, S., Lane, E., Geva, M. Materials Research Society	10 国際会議録 W AND RELATED ALLOYS DEPOSITED ONTO InP BY RT-LPCVD Katz, A., Feingold A, Lane, E., Nakahara, S., Geva M. Materials Research Society
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6 国際会議録 Non-Alloyed Ohmic Contacts on n-Type InP with Nitridation of Patterned InP Surface Ren, F., Pearton, S. J., Lothian, J.R., Chu, S.N.G., Chu, W.K., Wilson, R.G., Abernathy, C.R., Pei, S. Electrochemical Society	12 国際会議録 Zinc Incorporation And Diffusion in InP During Ap-MOCVD Growth Chu, S.N.G., Logan, R.A., Geva, M. Electrochemical Society

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