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*INTERFACIAL MICROSTRUCTURE AND CARRIER CONDUCTION PROCESS IN Pt/Ti OHMIC CONTACT TO p-In0.53Ga0.47As FORMED BY RAPID THERMAL PROCESSING

著者名:
Chu, S. N. G.
Katz, A.
Boone, T.
Thomas, P. M.
Riggs, V. G.
Dautremont-Smith, W. C.
Johnson Jr., W. D.
さらに 2 件
掲載資料名:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
181
発行年:
1990
開始ページ:
389
終了ページ:
400
総ページ数:
12
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990708 [1558990704]
言語:
英語
請求記号:
M23500/181
資料種別:
国際会議録

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