A MODEL FOR CHEMICAL VAPOR INFILTRATION OF FIBROUS SUBSTRATES

A MODEL FOR CHEMICAL VAPOR INFILTRATION OF FIBROUS SUBSTRATES

著者名:

掲載資料名:

Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

168

発行年:

1990

開始ページ:

67

終了ページ:

72

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990562 [1558990569]

言語:

英語

請求記号:

M23500/168

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015652
シリーズID:	PA00000011
会議名:	Symposium on chemical vapor deposition of refractory metals and ceramics
回次:	1989
会議開催地:	Boston, MA, USA
会議開催年:	1989.11.29-1989.12.01

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2 国際会議録 A KENETIC MODEL FOR METALORGANIC CHEMICAL VAPOR DEPOSITION OF GaAS FROM TRIMETHYLGALLIUM AND ARSINE Mountriaris, Triantafillos J., Jensen, Klavs F. Materials Research Society	8 国際会議録 MICROWAVE ASSISTED CHEMICAL VAPOR INFILTRATION Devlin, D.J., Currier, R.P., Barbero, R.S., Espinoza, B.F., Elliott, N. Materials Research Society
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