MICROSTRUCTURE AND KINETICS OF THE INTERFACE REACTION BETWEEN TITANIUM THIN FILMS AND (112) SAPPHIRE SUBSTRATES

MICROSTRUCTURE AND KINETICS OF THE INTERFACE REACTION BETWEEN TITANIUM THIN FILMS AND (112) SAPPHIRE SUBSTRATES

著者名:

掲載資料名:

Advanced electronic packaging materials : symposium held November 27-29, 1989, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

167

発行年:

1990

開始ページ:

335

終了ページ:

340

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990555 [1558990550]

言語:

英語

請求記号:

M23500/167

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015651
シリーズID:	PA00000011
会議名:	Symposium on advanced electronic packaging materials
回次:	1989
会議開催地:	Boston, MA, USA
会議開催年:	1989.11.27-1989.1129

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