SELECTIVE NUCLEATION OF SINGLE CRYSTAL CVD DIAMOND AND ITS APPLICABILITY TO SEMICONDUCTOR DEVICES
- 著者名:
- 掲載資料名:
- Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 162
- 発行年:
- 1990
- 開始ページ:
- 195
- 終了ページ:
- 200
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990500 [155899050X]
- 言語:
- 英語
- 請求記号:
- M23500/162
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Low Pressure and Low Temperature Synthesis of Diamond Films Using Magneto-Microwave Plasma CVD
Trans Tech Publications |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Trans Tech Publications |
MRS - Materials Research Society |
Electrochemical Society |