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CONTROL OF ETCHING IN LASER-CHEMICAL REACTION OF Mn-Zn FERRITE BY MeV ION IMPLANTATION

著者名:
Lu, Y.F.
Takai, M.
Sanda, H.
Chayahara, A.
Satou, M.
Minamisono, T.
Namba, S.
さらに 2 件
掲載資料名:
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
158
発行年:
1990
開始ページ:
301
終了ページ:
306
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990463 [1558990461]
言語:
英語
請求記号:
M23500/158
資料種別:
国際会議録

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