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DENSITY MEASUREMENTS OF ION IMPLANTED AMORPHOUS SILICON

著者名:
Custer, J.S.
Thompson, Michael O.
Jacobson, D.C.
Poate, J.M.
Roorda, S.
Sinke, W.C.
Spaepen, F.
さらに 2 件
掲載資料名:
Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
157
発行年:
1990
開始ページ:
689
終了ページ:
690
総ページ数:
2
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990456 [1558990453]
言語:
英語
請求記号:
M23500/157
資料種別:
国際会議録

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