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ION IMPLANT ACTIVATION AND REDISTRIBUTION IN AlXGa1-XAs

著者名:
Pearton, S.J.
Hobson, W.S.
Von Neida, A.E.
Haegel, N.M.
Jones, K.S.
Morris, N.
Sealy, B.J.
さらに 2 件
掲載資料名:
Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
157
発行年:
1990
開始ページ:
665
終了ページ:
670
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990456 [1558990453]
言語:
英語
請求記号:
M23500/157
資料種別:
国際会議録

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SPIE-The International Society for Optical Engineering
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