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* PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION OF CERAMIC FILMS AND COATINGS

著者名:
Davis, R. F.  
掲載資料名:
Processing science of advanced ceramics : symposium held April 27-28, 1989, San Diego, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
155
発行年:
1989
開始ページ:
213
終了ページ:
226
総ページ数:
14
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990289 [1558990283]
言語:
英語
請求記号:
M23500/155
資料種別:
国際会議録

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