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CRYSTALLINITY OF ISOLATED SILICON EPITAXY (ISE) SILICON-ON-INSULATOR LAYERS

著者名:
Allen, L. T. P.
Zavrachy, P. M.
Vu, D. P.
Batty, M. W.
Henderson, W. R.
Boden T. J.
Bowen, D. K.
Gorden-Smith D.
Thomas, C. R.
Tjahjadi, T.
さらに 5 件
掲載資料名:
Chemistry and defects in semiconductor heterostructures
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
148
発行年:
1989
開始ページ:
409
終了ページ:
414
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990210 [1558990216]
言語:
英語
請求記号:
M23500/148
資料種別:
国際会議録

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