*FLOURIDE-SILICON REACTIONS AND THE ETCHING OF CRYSTALLINE SILICON

*FLOURIDE-SILICON REACTIONS AND THE ETCHING OF CRYSTALLINE SILICON

著者名:

掲載資料名:

Atomic scale calculations in materials science : symposium held November 28-December 1, 1988, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

141

発行年:

1989

開始ページ:

425

終了ページ:

436

総ページ数:

12

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990142 [1558990143]

言語:

英語

請求記号:

M23500/141

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015626
シリーズID:	PA00000011
会議名:	Symposium on atomic scale calculations in materials science
回次:	1988
会議開催地:	Boston, MA, USA
会議開催年:	1988.11.28-1988.12.01

類似資料:

1 国際会議録 Fluorine-Silicon Reactions and the Etching of Crystalline Silicon Walle,C.G.Van de, McFeely,F.R., Pantelides,S.T. Trans Tech Publications	7 国際会議録 *FRST-PRINCIPLES INVESTIGATIONS OF HYDROGEN AND FLUORINE ON SILICON SURFACES Van de Walle, Chris G. Materials Research Society
2 国際会議録 THEORY OF HYDROGEN REACTIONS IN SILICON Van de Walle, C. G., Bar-Yam, Y., Pantelides, S. T. Materials Research Society	8 国際会議録 ELECTRONIC STRUCTURE AND HYPERFINE PARAMETERS FOR HYDROGEN AND MUONIUM IN SILICON Van de Walle, Chris G. Materials Research Society
3 国際会議録 Hydrogen Diffusion and Passivation of Shallow Impurities in Crystalline Silicon Denteneer,P.J.H., Walle,C.G.Van de, Bar-Yam,Y., Pantelides,S.T. Trans Tech Publications	9 国際会議録 Electrostriction and crystalline phase transformations in a vinylidene flouride terpolymer Roland, C. M., Garrett, J. T., Qadri, S. B. Kluwer Academic Publishers
4 国際会議録 HYDROGEN DIFFUSION AND HYDROGEN-DOPANT REACTIONS IN CRYSTALLINE SILICON. PANTELIDES,S.T. Trans Tech Publications	10 国際会議録 DEFECTS IN AMORPHOUS SILICON Pantelides,S.T. Trans Tech Publications
5 国際会議録 ENHANCED AND RETARDED DIFFUSION OF SHALLOW IMPURITIES IN SILICON Nichols, C. S., Walle, de Van C. G, Pantelides, S. T. Materials Research Society	11 国際会議録 Silicon-Hydrogen Bonding and Hydrogen Diffusion in Amorphous Silicon Walle, C. G. van de, Street, R. A. MRS - Materials Research Society
6 国際会議録 *DEFECT REACTIONS AND ATOMIC DIFFUSION IN SILICON Pantelides, S.T. Materials Research Society	12 国際会議録 DEFECT DYNAMIS AND THE PROPERTIES OF AMORPHOUS SILICON- A NEW PERSPECTIVE Pantelides, S. T. Materials Research Society

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