A UHV TEM STUDY OF THE IN-SITU GROWTH OF ULTRA-THIN FILMS OF CoSi2 on Si (100)

A UHV TEM STUDY OF THE IN-SITU GROWTH OF ULTRA-THIN FILMS OF CoSi2 on Si (100)

著者名:

掲載資料名:

Characterization of the structure and chemistry of defects in materials : symposium held November 28-December 3, 1988, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

138

発行年:

1989

開始ページ:

403

終了ページ:

408

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990111 [1558990119]

言語:

英語

請求記号:

M23500/138

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015623
シリーズID:	PA00000011
会議名:	Symposium on characterization of the structure and chemistry of defects in materials
回次:	1988
会議開催地:	Boston, MA, USA
会議開催年:	1988.11.28-1988.12.03

類似資料:

1 国際会議録 GROWTH OF THIN EPITAXIAL CoSi2 LAYERS ON Si (100) Yalisove, S.M., Tung, R.T., Batstone, J.L. Materials Research Society	7 国際会議録 ULTRATHIN SINGLE CRYSTAL CoSi2 LAYERS ON Si (111) AND Si (100) Tung, R. T., Batstone, J. L., Yalisove, S. M. Materials Research Society
2 国際会議録 RECONSTRUCTION OF (100) SILICON/DISILICIDE INTERFACES Loretto, D., Gibson, J.M., White, Alice E., Short, K.T., Tung, R.T., Yalisove, S.M., Batstone, J.L. Materials Research Society	8 国際会議録 In Situ Study of the Oxide Mediated Epitaxy of CoSi2 on Si Kleinschmit, M. W., Yeadon, M., Gibson, J. M. MRS - Materials Research Society
3 国際会議録 BONDING IN THIN EPITAXIAL CoSi2 FILMS ON Si (100) Chabliss, David B., Rhodin, T. N., Rowe, J. E., Yalisove, S. M Materials Research Society	9 国際会議録 IN-SITU STUDIES OF THE MBE GROWTH OF GoSi2 ON Si (111) IN A UHV TRANSMISSION ELECTRON MICROSCOPE Gibson, J M., Batstone, J. L., Tung, R. T. Materials Research Society
4 国際会議録 Heteroepitaxy of CoSi2 on Patterned Si(100) Substrates Karpenko, O. P., Eaglesham, D. J., Yalisove, S. M. MRS - Materials Research Society	10 国際会議録 Kinetic Investigations of the Initial Oxidation Stage of Copper By In Situ UHV-TEM Yang, J. C., Yeadon, M., Kolasa, B., Olynick, D., Gibson, J. M. MRS - Materials Research Society
5 国際会議録 In Situ UHV TEM Investigations of the Initial Oxidation Stage of Copper Thin Films Yang, J. C., Yeadon, M., Kolasa, B., Gibson, J. M. MRS - Materials Research Society	11 国際会議録 Electron Speckle and Higher-Order Correlation Functions From Amorphous Thin Films Gibson, J. Murray, Treacy, M. M. J., Loretto, D. MRS - Materials Research Society
6 国際会議録 EQUILIBRIUM SHAPE OF CoSi2 IN SILICON Adams, D. P., Yalisove, S. M., Eaglesham, D. J. MRS - Materials Research Society	12 国際会議録 *IN-SITU TRANSMISSION ELECTRON MICROSCOPY OF THE FORMATION OF METAL-SEMICONDUCTOR CONTACTS Gibson, J. M., Loretto, D., Cherns, D. Materials Research Society

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