LASER PHYSICAL AND LASER CHEMICAL VAPOR DEPOSITION OF TiN AND TiNxOx FILMS
- 著者名:
- 掲載資料名:
- Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 129
- 発行年:
- 1989
- 開始ページ:
- 435
- 終了ページ:
- 440
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990029 [155899002X]
- 言語:
- 英語
- 請求記号:
- M23500/129
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
6
国際会議録
EPITAXIAL GROWTH OF TiN FILMS ON (100) SILICON SUBSTRATES BY LASER PHYSICAL VAPOR DEPOSITION
Materials Research Society |
MRS - Materials Research Society |