*LASER PROBES AND NUMERICAL MODELING AS PROCESS DIAGNOSTICS IN CHEMICAL VAPOR DEPOSITION
- 著者名:
- 掲載資料名:
- Process diagnostics : materials, combustion, fusion : symposium held April 5-7, 1988, Reno, Nevada, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 117
- 発行年:
- 1988
- 開始ページ:
- 23
- 終了ページ:
- 34
- 総ページ数:
- 12
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837876 [0931837871]
- 言語:
- 英語
- 請求記号:
- M23500/117
- 資料種別:
- 国際会議録
類似資料:
American Institute of Chemical Engineers |
Materials Research Society |
MRS - Materials Research Society |
North-Holland |
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
American Chemical Society |
10
国際会議録
LASER STUDIES OF THE SiH RADICAL/SURFACE INTERACTION DURING DEPOSITION OF A THIN A THIN FILMS
Materials Research Society |
American Institute of Chemical Engineers |
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |