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LARGE DIAMETER SOI WAFERS BY ZONE-MELTING-RECRYSTALLIZATION

著者名:
Zavracky, P. M.
Vu, D. P.
Allen, L.
Henderson, W.
Guekel, H.
Sniegowski, J. J.
Ford, T. P
Fan, J. C. C.
さらに 3 件
掲載資料名:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
107
発行年:
1988
開始ページ:
213
終了ページ:
220
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837753 [0931837758]
言語:
英語
請求記号:
M23500/107
資料種別:
国際会議録

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