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SOI STRUCTURES FORMED USING LINE-SOURCE ELECTRON BEAM RECRYSTALLIZATION

著者名:
Moore, C. A.
Meyer, J. D.
Fukumoto, J. T.
Szluk, N. J.
Thompson, L. R.
Knapp, J. A.
Collins, G. J.
Berkman, S.
さらに 3 件
掲載資料名:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
107
発行年:
1988
開始ページ:
207
終了ページ:
212
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837753 [0931837758]
言語:
英語
請求記号:
M23500/107
資料種別:
国際会議録

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