OXYGEN ION IMPLANTATION INTO GERMANIUM

OXYGEN ION IMPLANTATION INTO GERMANIUM

著者名:

掲載資料名:

Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

107

発行年:

1988

開始ページ:

137

終了ページ:

140

総ページ数:

4

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837753 [0931837758]

言語:

英語

請求記号:

M23500/107

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015593
シリーズID:	PA00000011
会議名:	Symposium on silicon-on-insulator and buried metals in semiconductors
回次:	1987
会議開催地:	Boston, MA, USA
会議開催年:	1987.11.30-1987.12.03

類似資料:

1 国際会議録 DAMAGE FORMATION IN SEMICONDUCTORS DURING MeV ION IMPLANTATION Sjoreen, T.P., Holland, O.W., El-Ghor, M.K., White, C.W. Materials Research Society	7 国際会議録 ION BEAM SYNTHESIS OF IrSi3 BY 1-MeV Ir ION IMPLANTATION INTO Si(111) Sjoreen, T. P., Hinneberg, H.-J. MRS - Materials Research Society
2 国際会議録 CHARACTERIZATION AND EVOLUTION OF MICROSTRUCTURES FORMED BY HIGH DOSE OXYGEN IMPLANTATION OF SILICON El-Ghor, M.K., Pennycook, S.J., Sjoreen, T.P., Narayan, J. Materials Research Society	8 国際会議録 ION BEAM SYNTHESIS OF IrSi3 BY IMPLANTATION OF 2 MeV Ir IONS+ Sjoreen, T.P., Hinneberg, H.-J., Chisholm, M.F. Materials Research Society
3 国際会議録 Carbon, Nitrogen, and Oxygen Ion Implantation of Stainless Steel Rej, D. J., Gavrilov, N. V., Emlin, D., Henins, I., Kern, K., Kurennykh, T., Mizgulin, V. N., Munson, C. P., Nastasi, … MRS - Materials Research Society	9 国際会議録 ELECTRICAL & STRUCTURAL PROPERTIES OF TiSi2 FILMS Ravindra, N.M., Fink, T., Moerkirk, Jr., R.P., Fathy, B. Materials Research Society
4 国際会議録 CAVITY FORMATION IN SIMOX STRUCTURES El-Ghor, M. K., Pennycook, S. J., Sjoreen, T. P., White, C. W., Narayan, J. Materials Research Society	10 国際会議録 ELECTRICAL, OPTICAL AND STRUCTURAL PROPERTIES OF THIN SiO2 FILMS ON Si Ravindra, N. M., Russo, O. L., Fathy, D., Narayan, J., Heyd, A. R., Vedam, K. Materials Research Society
5 国際会議録 EFFECT OF INTERMEDIATE THERMAL PROCESSING ON MICROSTRUCTURAL CHANGES OF OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL Lee, J. D., Park, J. C., Krause, S. J., Roitman, P., El-Ghor, M. K. Materials Research Society	11 国際会議録 ELECTRICAL, OPTICAL AND STRUCTURAL PROPERTIES OF THIN Si02 FILMS ON Si Ravindra, N. M., Russo, O. L., Fathy, D., Narayan, J., Heyd, A. R., Vedam, K. Materials Research Society
6 国際会議録 ION BEAM SYNTHESIS OF IrSi3 BY 1-MeV Ir ION IMPLANTATION INTO Si(111) Sjoreen, T. P., Hinneberg, H.-J. MRS - Materials Research Society	12 国際会議録 HCl OXIDATION OF HIGH DOSE ARSENIC IMPLANTED SILICON Choi, Seong Soo, Numan, M.Z., Finstad, T.G., Chu, W.K., Fathy, D. Materials Research Society

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