HYDROGEN PASSIVATION OF GRAIN BOUNDARIES IN POLYCRYSTALLINE SILICON DEPOSITED BY MOLECULAR BEAMS

HYDROGEN PASSIVATION OF GRAIN BOUNDARIES IN POLYCRYSTALLINE SILICON DEPOSITED BY MOLECULAR BEAMS

著者名:

掲載資料名:

Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

106

発行年:

1988

開始ページ:

359

終了ページ:

364

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837746 [093183774X]

言語:

英語

請求記号:

M23500/106

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015592
シリーズID:	PA00000011
会議名:	Symposium on polysilicon films and interfaces
回次:	1987
会議開催地:	Boston, MA, USA
会議開催年:	1987.12.01-1987.12.03

類似資料:

1 国際会議録 STRUCTURAL AND ELECTRICAL PROPERTIES OF MOLECULAR BEAM DEPOSITED POLYCRYSTALLINE SILICON Delage, S. L., Jeng, S. -J., Jousse, D., Iyer, S. S. Materials Research Society	7 国際会議録 Hydrogen Passivation of Polycrystalline Silicon Hanoka I. Jack Plenum Press
2 国際会議録 INFLUENCE OF THE DECORATION BY DISLOCATIONS ON GRAIN BOUNDARY PASSIVATION BY HYDROGEN IN SILICON Ammor, L., Mathian, G., Martinuzzi, S. Materials Research Society	8 国際会議録 A Grain Boundary Defect in Polycrystalline Films Rutledge, K. M. McNamara, Watkins, G. D., Zhou, X. MRS - Materials Research Society
3 国際会議録 Molecular Beam Epitaxialiy Deposited Amorphous Silicon Baribeau, J. H., Fogal, B. J., Lockwood, D. J., Noel, M., O'Leary, S. K., Zwinkels, J. C. Materials Research Society	9 国際会議録 Grain boundary structures and properties in polycrystalline silicon Tsuo, Y.S., Milstein, J.B., Surek, T. North-Holland
4 国際会議録 EFFECT OF GRAIN BOUNDARY SEGREGATION ON THE TRANS- BARRIER CONDUCTIVITY OF POLYCRYSTALLINE SILICON Pizzini, S., Acciarri, M. Materials Research Society	10 国際会議録 Hot-Wire Hydrogen Passivation of Polycrystalline Silicon TFTs Beldi, N., Bihan, F. Le, Kis-Sion, K., Sarret, M., Mohammed-Brahim, T., Raoult, F., Rogel, R., Guillet, J., Bouree, J. … MRS - Materials Research Society
5 国際会議録 Effects of Impurity Segregation on the Electrical Properties of Grain Boundaries in Polycrystalline Silicon Pizzini S., Borsani F., Sandrinelli A., Narducci D., Allegretti F. Plenum Press	11 国際会議録 MEASUREMENTS OF GRAIN BOUNDARY TRAP DENSITY AND HYDROGEN DIFFUSIVITY IN POLYCRYSTALLINE SILICON FET’S Moore, Chad B., Ast, Dieter G. Materials Research Society
6 国際会議録 Effect of Stress and Impurities on Preferential Amorphization on Grain Boundaries in Polycrystalline Silicon Takeda, M., Ohnuki, S., Watanabe, S., Abe, H., Naramoto, H., Okamoto, P. R., Lam, N. Q. MRS - Materials Research Society	12 国際会議録 Sub-Grain Boundary Spacing in Directionally Crystallized Si Films Obtained Via Sequential Lateral Solidification Crowder, M.A., Limanov, A.B., Im, James S. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12