LEAKAGE AND TRANSCONDUCTANCE IN POLYSIL ICON THIN FILM TRANSISTORS: EFFECT OF GRAIN BOUNDARY HYDROGENATION

LEAKAGE AND TRANSCONDUCTANCE IN POLYSIL ICON THIN FILM TRANSISTORS: EFFECT OF GRAIN BOUNDARY HYDROGENATION

著者名:

掲載資料名:

Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

106

発行年:

1988

開始ページ:

311

終了ページ:

316

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837746 [093183774X]

言語:

英語

請求記号:

M23500/106

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015592
シリーズID:	PA00000011
会議名:	Symposium on polysilicon films and interfaces
回次:	1987
会議開催地:	Boston, MA, USA
会議開催年:	1987.12.01-1987.12.03

類似資料:

1 国際会議録 HYDROGENATION EFFECT OF AMORPHOUS SILICON THIN FILM TRANSISTORS BY ATMOSPHERIC PRESSURE CVD Ahn, B.C., Kim, J.H., Kim, D.G., Moon, B.Y., Kim, K.N., Lee, C.W., Jang, J. Materials Research Society	7 国際会議録 Staircase Charge-Pumping Study of Trapping Centers at Grain-Boundary in Polysilicon Thin Film Transistors Kim, K.J., Kim, O. Electrochemical Society
2 国際会議録 GRAIN BOUNDARY SLIDING IN THIN SUBSTRATE-BONDED Al FILMS Prieler, M., Bohn, H. G., Schilling, W., Trinkaus, H. MRS - Materials Research Society	8 国際会議録 TRANSIENT LEAKAGE CURRENTS IN AMORPHOUS SILICON THIN-FILM TRANSISTORS Hack, M., Steemers, H., Weisfield, R. Materials Research Society
3 国際会議録 GRAIN BOUNDARY SLIDING IN THIN SUBSTRATE-BONDED Al FILMS Prieler, M., Bohn, H. G., Schilling, W., Trinkaus, H. MRS - Materials Research Society	9 国際会議録 Grain Boundary Modification During Long-Term Creep in Silicon Nitride Lofaj,F., Gu,H., Okada,A., Kawamoto,H. Trans Tech Publications
4 国際会議録 Hydrogenation Effect of Heterostructured CMOS Thin-Film Transistors in Low Temperature (<-550℃) RTCVD Films Lee, S.K., Choe, S.M., Ahn, C.G., Chung, W.J., Kwon, Y.K., Kang, B.K., Kim, O., Park, Y.B., Rhee, S.W. Electrochemical Society	10 国際会議録 RESISTIVITY AND CARRIER MOBILITIES IN HEAVILY DOPED POLYCRYSTALLINE SILICON THIN FILMS Kim, D. M., Qian, F., Bickford, C. U, Yu, S. Materials Research Society
5 国際会議録 Modeling and measurement of electrostatic micromirror array fabricated with single-layer polysil icon micromachining technology Min,Y.-H, Kim,Y.-K. SPIE-The International Society for Optical Engineering	11 国際会議録 Investigation of stability in polymer thin film transistors for flexible active-matrix displays Kim, Y. H., Park, S. K., Han, J. I., Moon, D.-G., Kim, W. K. SPIE - The International Society of Optical Engineering
6 国際会議録 Statistical Modeling of Grain-Enhanced Polysilicon Thin-Film Transistor in Consideration of Grain Boundary Distribution Cheng, C.F., Poon, M.C., Kok, C.W., Chan, M. Materials Research Society	12 国際会議録 Interface Constraint on Grain Boundary Relaxation in Thin Al- and Al-Alloy Films on Si-Substrates Su,C.M., Bohn,H.G. Trans Tech Publications

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