Blank Cover Image

STRUCTURAL AND ELECTRICAL PROPERTIES OF HEAVILY-DOPED RAPID THERMAL-PROCESSED POLYSILICON EMITTERS AND CONTACTS ON SILICON

著者名:
Raicu, B.
Christel, L. A.
Huang, K. -G.
Hashimoto, S.
Gibson, W. M.
Ward, I.
さらに 1 件
掲載資料名:
Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
106
発行年:
1988
開始ページ:
267
終了ページ:
272
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837746 [093183774X]
言語:
英語
請求記号:
M23500/106
資料種別:
国際会議録

類似資料:

1 国際会議録 CONTROL OF POLYSILICON EMITTER BIPOLAR TRANSISTOR CHARACTERISTICS BY RAPID THERMAL OR FURNACE ANNEAL OF THE POLYSILICON/SILICON INTERFACE

Bhattacharya, S., Lobo, M., Jung, L., Banerjee, S., Reuss, R., Batra, S., Park, K., Hu, G.

Materials Research Society
7 国際会議録 Electrical and Structural Characterization of Boron Implanted Silicon Following Laser Thermal Processing

Jones, K.S., Gable, K.A., Law, M.E., Robertson, L.S., Talwar, S.

Materials Research Society
2 国際会議録 SECONDARY GRAIN GROWTH IN HEAVILY DOPED POLYSILICON DURING RAPID THERMAL ANNEALING

Batra, S., Park, K., Lobo, M., Banerjee, S.

Materials Research Society
8 国際会議録 RAPID THERMAL OXIDATION OF HEAVILY DOPED SILICON

Slaoui, A., Hartiti, B., Busch, M. C., Muller, J. C., Siffert, P.

Materials Research Society
3 国際会議録 ELECTRICAL AND STRUCTURAL CHARACTERIXATION OF POLYSILICON DEPOSITED IN A RAPID THERMAL PROCESSOR

Xen, R., OztOrk, k, M. C., Wortman, J. J., Batchelor, D., Maher, D., Blat, C., Niccolian, E.

Materials Research Society
9 国際会議録 MULTI-STEP RAPID THERMAL ANNEALING TO IMPROVE THE STRUCTURAL AND ELECTRICAL PROPERTIES OF GaAs ON Si

Zou, G., De Boeck, J., de Potter, M., Deneffe, K., de Wolf, I., Vanhellemont, J., Borghs, G., Van Rossum, M.

Materials Research Society
4 国際会議録 IMPROVING THE STRUCTURAL AND ELECTRICAL PROPERTIES OF EPITAXIAL CaF2 ON Si BY RAPID THERMAL ANNEALING

Phillips, J.M., Manger, M.L., Pfeiffer, L., Joy, D.C., Smith III, T.P., Augustyniak, W.M., West, K.W.

Materials Research Society
10 国際会議録 A NEW APPLICATION OF RB-PIXE WITH HIGH ENERGY MICROBEAM

Raicu, B., Bakhrum, H., Fesseha, S., Gibson, W.M.

Materials Research Society
5 国際会議録 Rapid Thermal Oxidation of Heavily Doped Silicon for Advanced Solar Cell Processing

Sivoththaman, S., Laureys, W., Nijs, J., Mertens, R.

MRS - Materials Research Society
11 国際会議録 Relationship of Electrical, Magnetic, and Mechanical Properties to Processing in High-Temperature Superconductors

Blendell, J. E., Chiang, C. K., Cranmer, D. C., Freiman, S. W., Fuller, E. R., Jr., Drescher-Krasicka, E., Johnson, Ward …

American Chemical Society
6 国際会議録 POLYSILICON/SILICON INTERFACES: EFFECT OF PROCESSING PARAMETERS ON PHYSICAL AND ELECTRICAL PROPERTIES

Srikrishna, K., Moinpour, M., Landau, B.

Materials Research Society
12 国際会議録 PROPERTIES OF THIN INTER-POLYSILICON REOXIDIZED NITRIDED OXIDES PREPARED BY RAPID THERMAL PROCESSING (TRO/RTN/RTO)

Cheung, Andres W., Lo, G. Q., Kwong, Dim-Lee, Alvi, N. S., Kermani, a.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12