Blank Cover Image

DOPANT DIFFUSION AND GRAIN GROWTH IN ARSENIC-IMPLANTED POLY-Si

著者名:
掲載資料名:
Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
106
発行年:
1988
開始ページ:
135
終了ページ:
142
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837746 [093183774X]
言語:
英語
請求記号:
M23500/106
資料種別:
国際会議録

類似資料:

Zheng, L. R., Hung, L. S., Mayer, J. W.

Materials Research Society

Eguchi, S., Leitz, C.W., Fitzgerald, E.A., Hoyt, J.L.

Materials Research Society

Zheng, L. R, Hung, L. S., Mayer, J. W

North-Holland

Lee, S.-Tong, lavine, J. P., Fellinger, P. R.

Materials Research Society

Hochbauer, T., Nastasi, M., Lau, S. S., Zheng, Y., Mayer, J. W.

MRS - Materials Research Society

Chen, S. H., Barbour, J. C., Zheng, L. R., Carter, C. B., Mayer, J. W.

Materials Research Society

4 国際会議録 Lateral silicide growth

Zheng, L. R., Zingu, E., Mayer, J. W.

North-Holland

Pearton, S. J., Abernathy, C. R., Vartuli, C. B., Wilson, R. G., Zavada, J. M.

MRS - Materials Research Society

Hung, L. S., Chen, S. H., Mayer, J. W.

Materials Research Society

Mayer, J. W., Fastow, R., Galvin, G., Hung, L. S., Nastasi, M., Thompson, M. O., Zheng, L. R.

North-Holland

Zheng, L.R., Hung, L.S., Mayer, J.W.

Materials Research Society

Atzmon, Z., Sharma, R., Russell, S. W., Mayer, J. W.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12