Blank Cover Image

ELECTRICAL CHARACTERISTICS OF TiSi2/n+-POLYSILICON/ Si02/Si MOS CAPACITORS STRESSED UNDER HIGH TEMPERATURE SILICIDE PROCESSING CONDITIONS

著者名:
掲載資料名:
SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
105
発行年:
1988
開始ページ:
295
終了ページ:
300
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837739 [0931837731]
言語:
英語
請求記号:
M23500/105
資料種別:
国際会議録

類似資料:

Shenai, K., Piacente, P. A., Smith, G. A., Lewis, N., McConnell, M . D., Norton, J. F., Hall, E. L., Baliga, B. J.

Materials Research Society

Lewis, N., Shenai, K., Smith, G.A., Piacente, P.A., Baliga, B.J.

Materials Research Society

Ravindra, N.M., Fink, T., Moerkirk, Jr., R.P., Fathy, B.

Materials Research Society

Shenai, K., Piacente, P.A., Lewis, N., McConnell, M.D., Smith, G.A., Baliga, B.J.

Materials Research Society

Campbell, P M, Aina, O., Baliga, B. J., Ehle, R.

North-Holland

Felch, Susan B., Hodul, David T., Salimian, Mak

Materials Research Society

F. Hirose, K. Kanomata, T. Suzuki, N. Oyama

Electrochemical Society

Shenai, K., Lewis, N., Smith, G.A., Baliga, B.J.

Materials Research Society

K. Okamoto, K. Kakushima, P. Ahmet, K. Tsutsui, N. Sugii

Electrochemical Society

Crean, G.M., Cole, P.D., Stoemenos, J.

Materials Research Society

S.Y. Liu, Y.F. Jiang, W.J. Sung, X.Q. Song, B.J. Baliga, W.F. Sun, A.Q. Huang

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12