TEM STUDY OF METAL IMPURITY PRECIPITATES IN THE SURFACE REGIONS OF SILICON WAFERS

TEM STUDY OF METAL IMPURITY PRECIPITATES IN THE SURFACE REGIONS OF SILICON WAFERS

著者名:

掲載資料名:

Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

104

発行年:

1988

開始ページ:

215

終了ページ:

218

総ページ数:

4

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837722 [0931837723]

言語:

英語

請求記号:

M23500/104

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015590
シリーズID:	PA00000011
会議名:	Symposium on defects in electronic materials
回次:	1987
会議開催地:	Boston, MA, USA
会議開催年:	1987.11.30-1987.12.03

類似資料:

1 国際会議録 Metal impurity precipitation in silicon Seibt, M. Electrochemical Society	7 国際会議録 Deposition Mechanism of Trace Metals on Silicon Wafer Surfaces in Ultra Pure Water Homma,T., Tsukano,J., Osaka,T., Watanabe,M., Nagai,K. Electrochemical Society, SPIE-The International Society for Optical Engineering
2 国際会議録 RELAXATION-INDUCED GETTERING OF MEAL IMPURITIES IN SILICON: MICROSCOPIR PROPERTIES OF EFFECTIVE GETTERING SITES Seibt, M. Materials Research Society	8 国際会議録 Thick Bonded Silicon-On-Insulator Wafer with Polysilicon Interlayer for Gettering of Metal Impurities J. Hintsala, J. Mäkinen, S. Whiston, P. Daly, K. Nunan Electrochemical Society
3 国際会議録 Modeling of Internal Gettering for Metal Impurities by Oxide Precipitates in CZ-Si Wafer Sueoka, K. Electrochemical Society	9 国際会議録 AN EVAULATION OF METALLIC IMPURITY CLUSTER ON SILICON WAFER SURFACE BY SC I REPEAT CLEANING Mizuno, M., Fukami, T., Takenaka, T. Electrochemical Society
4 国際会議録 Novel method to reduce the surface recombination velocity for the carrier lifetime measurement in silicon wafers Arndt, W., Graff, K., Heim, P. Electrochemical Society	10 国際会議録 Techniques for metal contamination analysis and control Graff, K. Electrochemical Society
5 国際会議録 Self-Interstitial Supersaturation During Ostwald Ripening of End-of-Range Defects in Ion-Implanted Silicon Seibt, M. MRS - Materials Research Society	11 国際会議録 TEM and PL Study of FeSi2 Precipitates Formed in Si by Iron Implantation Using a Metal Vapor Vacuum Arc Ion Source Wong, S.P., Gao, Y., Shao, G., Cheung, W.Y., Homewood, K.P. Materials Research Society
6 国際会議録 Deposition Mechanism of Trace Metals on Silicon Wafer Surfaces in Ultra Pure Water Homma, T., Tsukano, J., Osaka, T., Watanabe, M., Nagai, K. Electrochemical Society	12 国際会議録 TEM STUDIES OF PRECIPITATE GROWTH AT THE ATOMIC LEVEL Howe, J.M., Gronsky, R. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12