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DEPOSITION OF AMORPHOUS CARBON FILMS BY LASER INDUCED CVD

著者名:
掲載資料名:
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
101
発行年:
1988
開始ページ:
367
終了ページ:
372
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837692 [0931837693]
言語:
英語
請求記号:
M23500/101
資料種別:
国際会議録

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