Blank Cover Image

MICROSTRUCTURE OF GOLD FILMS GROWN BY ION INDUCED DEPOSITION

著者名:
掲載資料名:
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
101
発行年:
1988
開始ページ:
255
終了ページ:
260
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837692 [0931837693]
言語:
英語
請求記号:
M23500/101
資料種別:
国際会議録

類似資料:

1 国際会議録 THE MICROSTRUCTURE OF GOLD FILMS WRITTEN BY FOCUSED ION BEAM INDUCED DEPOSITION

Blauner, P.G., Ro, J.S., Butt, Y., Thompson, C.V., Melngailis, J.

Materials Research Society
7 国際会議録 Assessing the impact of atomic oxygen in the damage threshold and stress of Hafnia films grown by ion beam sputter deposition

D. Patel, Y. Wang, M. Larotonda, J. Lovewell, J. Jensen, K.J. Hsiao, E. Krous, J.J. Rocca, C.S. Menoni, F. Tomasel, S. …

SPIE - The International Society of Optical Engineering
2 国際会議録 Focused Ion Beam Induced Deposition

Melngailis J., Dubner D. A., Ro S. J., Shedd M. G., Lezec H.

Martinus Nijihoff Publishers
8 国際会議録 THE EFFECT OF DEPOSITION TEMPERATURE ON THE MICROSTRUCTURE OF LPCVD POLYSILICON FILMS

Hangas, J., Liu, D. R., Oei, D. G., McCarthy, S. L., Peters, C.

Materials Research Society
3 国際会議録 IN-SITU MEASUREMENT OF ION BEAM INDUCED DEPOSITION OF GOLD

Dubner, A. D., Wagner, A

Materials Research Society
9 国際会議録 Nanoscale Electromechanical Phenomena in Ferroelectric Thin Films

Ganpule, C.S., Roytburd, A.L., Stanishevsky, A., Nagarajan, V., Williams, E.D., Ramesh, R., Melngailis, J.

Materials Research Society
4 国際会議録 *FOCUSED ION BEAM INDUCED DEPOSITION

Melngailis, John, Blauner, Patricia G.

Materials Research Society
10 国際会議録 The Control of Gold Nanocluster Sizes in Dielectric Thin Films via Ion Beam Assisted Deposition

Schiestel, S., Carosella, C.A., hubker, G.K., Qadri, S.B., Knies, D., Stroud, R.M.

Materials Research Society
5 国際会議録 SEGREGATION AND TRAPPING OF GOLD DURING ION-INDUCED CRYSTALLIZATION OF AMORPHOUS Si

Poate, J. M., Linnros, J., Priolo, F., Jacobson, D. C., Batstone, J. L., Thompson, M. O.

Materials Research Society
11 国際会議録 Influence of a TiN interlayer on the microstructure and mechanical properties of hydroxyapatite films grown by pulsed laser deposition

Nelea,V.D., Ristoscu,C., Colis,S., Arens,S., Pelletier,H., Mihailescu,I.N., Mille,P.

SPIE-The International Society for Optical Engineering
6 国際会議録 Substrate Heating Measurements in Pulsed Ion Beam Film Deposition

Olson, J. C., Thompson, M. O., Davis, H. A., Rej, D. J., Waganaar, W. J., Tallant, D. R.

MRS - Materials Research Society
12 国際会議録 CHANGING SEGREGATION COEFFICIENTS DURING ION BEAM INDUCED EPITAXY OF AMORPHOUS Si

Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12