LOW RESISTIVITY CONTACT FORMATION FOR LSI INTERCONNECTION WITH SHORT-PULSE-LASER INDUCED Mo CVD
- 著者名:
Uesugi, F. Morishige, Y. Shinzawa, T. Kishida, S. Hirata, M. Yamada, H. Matsumoto, K. - 掲載資料名:
- Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 101
- 発行年:
- 1988
- 開始ページ:
- 61
- 終了ページ:
- 66
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837692 [0931837693]
- 言語:
- 英語
- 請求記号:
- M23500/101
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
7
国際会議録
Metal-To-Silicon Contact Formation for Highly Reliable ULSI by Low-Energy Ion Bombardment Process
Electrochemical Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |