SOFT VACUUM, PULSED ELECTRON BEAM PROCESSING OF POLYMIDES
- 著者名:
- 掲載資料名:
- Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 101
- 発行年:
- 1988
- 開始ページ:
- 21
- 終了ページ:
- 26
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837692 [0931837693]
- 言語:
- 英語
- 請求記号:
- M23500/101
- 資料種別:
- 国際会議録
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8
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CHEMICAL VAPOR DEPOSITION OF SILICON INSULATING FILMS INDUCED WITH PERPENDICULAR ELECTRON BEAM
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