*SYNTHESIS OF BURIED SILICON COMPOUNDS USING ION IMPLANTATION

*SYNTHESIS OF BURIED SILICON COMPOUNDS USING ION IMPLANTATION

著者名:

掲載資料名:

Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

100

発行年:

1988

開始ページ:

3

終了ページ:

16

総ページ数:

14

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837685 [0931837685]

言語:

英語

請求記号:

M23500/100

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015586
シリーズID:	PA00000011
会議名:	Symposium on fundamentals of beam-solid interactions and transient thermal processing
回次:	1987
会議開催地:	Boston, MA, USA
会議開催年:	1987.11.30-1987.12.03

類似資料:

1 国際会議録 *SYNTHESIS OF BURIED SILICON COMPOUNDS USING ION IMPLANTATION White, A. E., Short, K. T., Dynes, R. C., Gibson, J. M., Hull, R. Materials Research Society	7 国際会議録 EVOLUTION OF BURIED COBALT SILICIDE LAYERS FORMED BY Co IMPLANTATION IN Si(111) Hsieh, Yong-Fen, Hull, Robert, White, Alice E., Short, Ken T. Materials Research Society
2 国際会議録 MESOTAXY: GROWTH OF BURIED SINGLE-CRYSTAL CoSi2 LAYERS BY IMPLANTATION White, Alice E., Short, K.T., Dynes, R.C., Garno, J.P., Gibson, J.M. Materials Research Society	8 国際会議録 MESOTAXY LAYERS OF IrSi3 IN (111)Si FORMED BY MeV ION IMPLANTATION Short, K. T., White, Alice E., Eaglesham, D. J., Jacobson, D. C., Poate, J. M. Materials Research Society
3 国際会議録 MESOTAXY: SINGLE-CRYSTAL GROWTH OF BURIED SILICIDE LAYERS White, Alice E.., Short, K.. T., Dynes, R. C., Garno, J. P., Gibson, J. M. Materials Research Society	9 国際会議録 MECHANICS OF FORMATION OF THIN BURIED OXIDE LAYERS BY ION IMPLANTATION White, Alice E.., Short, K.. T., Pfeiffer, L. N, West. K. W. Materials Research Society
4 国際会議録 MICROSTRUCTURAL CHARACTERIZATION OF HIGH DOSE OXYGEN IMPLANTED SILICON Batstone, J.L., White, Alice E., Short, K..T., Gibson, J.M., Jacobson, D.C. Materials Research Society	10 国際会議録 RECONSTRUCTION OF (100) SILICON/DISILICIDE INTERFACES Loretto, D., Gibson, J.M., White, Alice E., Short, K.T., Tung, R.T., Yalisove, S.M., Batstone, J.L. Materials Research Society
5 国際会議録 COMPARISON OF CONDUCTIVITY PRODUCED IN POLYMERS AND CARBON FILMS BY PYROLYSIS AND HIGH ENERGY ION IRRADIATION Venkatesan, T., Dynes, R. C., Wilkens, B., White, A. E., Gibson, J. M., Hamm. R. North-Holland	11 国際会議録 *SEMICONDUCTOR SUPERLATTICES: ORDER AND DISORDER Hull, R., Turner, J, E., Fischer-Colbrie, A., White, Alice E., Short, K. T., Tu, C. W. Materials Research Society
6 国際会議録 ION-BEAM-INDUCED DESTRUCTION OF SUPERCONDUCTING PHASE COHERENCE IN YBa2Cu3O7-δ White, Alice E., Short, K. T., Jacobson, D. C., Poate, J. M., Dynes, R. C., Mankiewich, P. M., Skocpol, W. J., Howard, … Materials Research Society	12 国際会議録 THE ROLE OF IMPLANT TEMPERATURE IN THE FORMATION OF THIN BURIED OXIDE LAYERS White, Alice E., Short, K.T., Pfeiffer, L.N., West, K.W., Batstone, J.L. Materials Research Society

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