HYDROGEN DIFFUSION IN UNDOPED a-Si:H

HYDROGEN DIFFUSION IN UNDOPED a-Si:H

著者名:

掲載資料名:

Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

95

発行年:

1987

開始ページ:

165

終了ページ:

170

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837623 [0931837626]

言語:

英語

請求記号:

M23500/95

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015581
シリーズID:	PA00000011
会議名:	Symposium on amorphous silicon semiconductors
回次:	1987
会議開催地:	Anaheim, CA, USA
会議開催年:	1987.04.21-1987.04.24

類似資料:

1 国際会議録 FLOURINE INCORPORATION AND ANNEALING PROPERTIES OF a-Si,Ge:H,F ALLOYS STUDIED BY ELASTIC PROTON SCATTERING AND IR ABSORPTION Schwarz, R., Okada, Y., Chou, S.F., Kolodzey, J., Slobodin, D., Wagner S. Materials Research Society	7 国際会議録 PREPARATION OF a-(Si,Ge):H ALLOYS BY D. C. GLOW DISCHARGE DEPOSITION Slobodin, D., Aljishi, S., Schwarz, R., Wagner, S. Materials Research Society
2 国際会議録 INFRARED SPECTROSCOPY OF DEUTERATED a-Si,Ge:D,F ALLOYS PREPARED BY DC GLOW DISCHARGE DEPOSITION Okada, Y., Slobodin, D., Chou, S.F., Schwarz, R., Wagner, S. Materials Research Society	8 国際会議録 DEPOSITION OF a-Ge:H BY GeF4/H2 GLOW DISCHARGE Slobodin, D., Aljishi, S., Wagner, S. Materials Research Society
3 国際会議録 a-(Si,Ge):H,F ALLOYS PREPARED FROM SiH4 AND GeF4 Slobodin, D., Aljishi, S., Okada, Y., Shen, D.-S., Chu, V., Wagner, S. Materials Research Society	9 国際会議録 INTERNAL PHOTOEMISSION MEASUREMENTS FOR THE DETERMINATION OF SCHOTTKY BARRIER HEIGHT ON a-Si,Ge:H,F ALLOYS Chu, V., Aljishi, S., Slobodin, D., Wagner, S. Materials Research Society
4 国際会議録 TEMPERATURE DEPENDENCE OF OPTICAL PROPERTIES AND MINORITY CARRIER DIFFUSION LENGTH IN a-SiGe:H,F Schwarz, R., Dietrich, K., Goedecker, S., Kolodzey, J, Slobodin, D., Wagner, S. Materials Research Society	10 国際会議録 THE INFLUENCE OF THE VOID STRUCTURE ON DEUTERIUM DIFFUSION IN a-Si:H van den Boogaard, M.J., Jones, S.J., Chen, Y., Williamson, D.L., Hakvoort, R.A., van Veen, A., van der Steege, A.C., … Materials Research Society
5 国際会議録 DEPENDENCE OF HYDROGEN INCORPORATION IN UNDOPED a-Si:H AND μc-Si:H ON HYDROGEN DILUTION DURING PECVD Johnson, N.M., Wolff, S.H., Doland, C.D., Walker, J. Materials Research Society	11 国際会議録 Hydrogen Diffusion in Polycrystalline Boron Doped and Undoped Diamond Ballutaud, D., Bouty-Forveille, A., Laroche, J.-M., Simon, N., Girard, H., Herlem, M., Etcheberry, A. Materials Research Society
6 国際会議録 IR AND SIMS STUDY OF HYDROGEN DIFFUSION IN RF SPUTTER DEPOSITED BORON DOPED a-Si:H AND UNDOPED a-Ge:H Mitra, S., Wu, X.-L, Shinar, R., Shinar, J. Materials Research Society	12 国際会議録 ETCHING SELECTIVITY OF SiF4 AND H2 PLASMAS FOR c-Si, A-Si:H AND Si02 Okada, Y., Wagner, S Materials Research Society

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