Blank Cover Image

CHARACTERIZATION OF BURIED-NITRIDE SILICON FOR INTEGRATED CIRCUIT APPLICATIONS

著者名:
Myers, D. R.
Stein, H., J.
Tsao, S. S.
Arnod, G. W.
Hughes, R. C.
Miller, W. M.
Jones, R. V.
Datye, A. K
さらに 3 件
掲載資料名:
Materials modification and growth using Ion beams : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
93
発行年:
1987
開始ページ:
113
終了ページ:
118
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837609 [093183760X]
言語:
英語
請求記号:
M23500/93
資料種別:
国際会議録

類似資料:

1 国際会議録 FORMATION OF BURIED NITRIDE LAYERS IN (110) SILICON

Datye, A. K., Kaushik, V. S., Kendall, D. L., Martinez-Tovar, B., Myers, D. R.

Materials Research Society
7 国際会議録 Laser applications in integrated circuit packaging

Lu, Y.F., Song, W.D., Ren, Z.M., An, C.W., Ye, K.D., Liu, D.M., Wang, W.J., Hong, M.H., Chong, T.C.

SPIE-The International Society for Optical Engineering
2 テクニカルペーパー LEC GaAs FOR INTEGRATED CIRCUIT APPLICATIONS

Kirkpatrick, C. G., Chen, R. T., Holmes, D. E., Asbeck, P. M., Elliott, K. R., Fairman, R. D., Oliver, J. D.

National Aeronautics and Space Administration
8 国際会議録 SOLUTE BINDING AT VOID SURFACES IN SILICON AND GERMANIUM

Myers, S.M., Bishop, D.M., Follstaedt, D.M., Stein, H.J., Wampler, W.R.

Materials Research Society
3 国際会議録 Interaction of deuterium with internal surfaces in silicon

Myers,S.M., Follstaedt,D.M., Stein,H.J., Wampler,W.R.

Trans Tech Publications
9 国際会議録 Expansion Behavior of Epoxy Encapsulated Integrated Circuits

Bair, H. E., Boyle, D. J., Steiner, K. G., Young, A. L.

Society of Plastics Engineers, Inc. (SPE)
4 国際会議録 Equilibration in Amorphous Silicon Nitride Alloys

Dunnett, B., Cooper, C. H., Murley, D. T., Gibson, R. A. G., Jones, D. I., Powell, M. J., Deane, S. C., French, I. D.

MRS - Materials Research Society
10 国際会議録 Deposition and Characterization of Silicon and Carbon Nitride

Myers, A. F., Tucker, D. A., Bozeman, S. P., Camphausen, S. M., Powers, M. J., Bruley, J., Hren, J. J., Cuomo, J. J.

MRS - Materials Research Society
5 国際会議録 Integrated Photonic Circuits on Silicon

Valette S., Jadot J. P., Gidon P., Renard S., Grand G., Fournier A., Grouillet A. M., Phillippe P., Denis H., Desgranges …

Kluwer Academic Publishers
11 国際会議録 Silicon nitride membranes for filtration and separation

Galambos,P., Zavadil,K., Shul,R.J., Willison,C.G., Miller,S.L.

SPIE - The International Society for Optical Engineering
6 国際会議録 Development of Silicon Nitride Films for Gate Dielectric Applications

Brady, D., Watt, V.H.C., Karamcheti, A., Vishnubhotla, L., Bersuker, G., Kim, S., Zietzoff, P., Gilmer, M., Guan, J., …

Electrochemical Society
12 国際会議録 ELECTRICAL CHARACTERIZATION OF SILICON WITH BURIED DEFECTS

Honeycutt, J., Radzimski, Z., Kola, R. R., Salih, A. S. M., Rozgonyi, G. A.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12