Blank Cover Image

SECONDARY GRAIN GROWTH DURING RAPID THERMAL ANNEALING OF DOPED POLYSILICON FILMS

著者名:
掲載資料名:
Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
92
発行年:
1987
開始ページ:
335
終了ページ:
340
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837593 [0931837596]
言語:
英語
請求記号:
M23500/92
資料種別:
国際会議録

類似資料:

1 国際会議録 SECONDARY GRAIN GROWTH IN HEAVILY DOPED POLYSILICON DURING RAPID THERMAL ANNEALING

Batra, S., Park, K., Lobo, M., Banerjee, S.

Materials Research Society
7 国際会議録 RAPID THERMAL ANNEALING OF DOUBLE POLYSILICON BIPOLAR TRANSISTORS

Patton, Evan E., Yamaguchi, Tadanori, Lee, June, Tang, Alex, Yu, S Y.-C

Materials Research Society
2 国際会議録 POLYSILICON GRAIN GROWTH BY RAPID ISOTHERMAL ANNEALING

Pinizzotto, R. F., Clark, F. Y., Malhi, S. D. S., Shah, R. R.

North Holland
8 国際会議録 SURFACE STRESS EFFECTS ON THIN FILM GROWTH

Cammarata, R. C.

MRS - Materials Research Society
3 国際会議録 Secondary Grain Growth in Thin Films

Thompson, C. V., Smith, Henry I.

Materials Research Society
9 国際会議録 CONTROL OF POLYSILICON EMITTER BIPOLAR TRANSISTOR CHARACTERISTICS BY RAPID THERMAL OR FURNACE ANNEAL OF THE POLYSILICON/SILICON INTERFACE

Bhattacharya, S., Lobo, M., Jung, L., Banerjee, S., Reuss, R., Batra, S., Park, K., Hu, G.

Materials Research Society
4 国際会議録 DOPANT ENHANCED GRAIN GROWTH DURING CRYSTALLIZATION OF AMORPHOUS SILICON USING RAPID THERMAL ANNEALING

Kakkad, R., Fonash, S. J., Howell, P. R.

Materials Research Society
10 国際会議録 Non-Destructive Characterisation of Rapid Thermally Annealed N+-Doped Polysilicon Using Spectroscopic Ellepsometry

Carline, R. T., Leong, W. Y., Cullis, A. G., Houlton, M. R., Hope, D. A.

MRS - Materials Research Society
5 国際会議録 GRAIN GROWTH PROCESSES DURING TRANSIENT ANNEALING OF As-IMPLANTED, POLYCRYSTALLINE-SILICON FILMS

Krause, S. J., Wilson, S. R., Paulson, W. M., Gregory, R. B.

Materials Research Society
11 国際会議録 THE EFFECTS OF DOPANTS ON SURFACE-ENERGY-DRIVEN SECONDARY GRAIN GROWTH IN ULTRATHIN Si FILMS

Kim, H.-J., Thompson, C.V.

Materials Research Society
6 国際会議録 LARGE-GRAIN POLYSILICON FILMS DEPOSITED BY RAPID THERMAL LPCVD

Mitchell, S. J. N., McNeil, D. W., Raza, S. H., Armstrong, B. M., Gamble, H. S.

Materials Research Society
12 国際会議録 Application of Rapid Thermal Annealing on LPCVD Polysilicon Films for Piezoresistivity

Kleimann, P., Berre, M. Le, Barbier, D., Pinard, P.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12