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ON THE CRITIAL LAYER THICKNESS OF STRAINED-LAYER HETERO-EPITAXIAL CoSi2 FILMS ONF < 111 > Si

著者名:
Jamieson, D. N.
Bai, G.
Kao, Y. C.
Nieh, C. W.
Nicolet, M-A.
Wang, K. L.
さらに 1 件
掲載資料名:
Heteroepitaxy on silicon II : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
91
発行年:
1987
開始ページ:
479
終了ページ:
484
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837586 [0931837588]
言語:
英語
請求記号:
M23500/91
資料種別:
国際会議録

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