Blank Cover Image

*THE ROLE OF LOW-ENERGY ION/SURFACE INTERACTIONS DURING CRYSTAL GROWTH FROM THE VAPOR PHASE

著者名:
掲載資料名:
Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
75
発行年:
1987
開始ページ:
39
終了ページ:
56
総ページ数:
18
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837418 [0931837413]
言語:
英語
請求記号:
M23500/75
資料種別:
国際会議録

類似資料:

1 国際会議録 *THE ROLE OF LOW-ENERGY ION/SURFACE INTERACTIONS DURING CRYSTAL GROWTH FROM THE VAPOR PHASE

Greene, J.E., Rockett, A., Sundgren, J.-E.

Materials Research Society
7 国際会議録 MODELING SURFACE DIFFUSION AND GROWTH Si(100)(2xl): KINETICS, THERMODYNAMICS, AND MODEL EFFECTS

Rockett, A.

Electrochemical Society
2 国際会議録 *THE ROLE OF LOW-ENERGY ION/SURFACE INTERACTIONS DURING CRYSTAL GROWTH FROM THE VAPOR PHASE: EFFECTS ON MICROCHEMISTRY AND MICROSTRUCTURE

Green, J.E., Sundgren, J.-E.

Materials Research Society
8 国際会議録 *SIMULATIONS OF LOW-ENERGY ION/SURFACE INTERACTION EFFECTS DURING EPITAXIAL FILM GROWTH

Kitabatake, Makoto, Greene, J. E.

Materials Research Society
3 国際会議録 LOW-ENERGY ION/SURFACE INTERACTIONS DURING FILM GROWTH KINETICS, DEFECT STRUCTURE, AND ELEMENTAL INCORPORATION PROBABILITIES

Greene E. J., Barnett A. S., Sundgren -E. J., Rockett A.

Kluwer Academic Publishers
9 国際会議録 INDIUM ION DOPING DURING Si MOLECULAR BEAM EPITAXY

Hirashita, N., Noel, J. -P., Rockett, A., Markert, L., Greene, J.-E., Hasan, M. A., Knall, J., Ni, W,.-X., Sundgren, J. …

Materials Research Society
4 国際会議録 MOLECULAR DYNAMICS SIMULATIONS OF LOW-ENERGY ION/SURFACE INTERACTIONS DURING VAPOR PHASE CRYSTAL GROWTH: 10 eV Si INCIDENT ON Si(001)2x1

Kitabatake, M., Fons, P., Greene, J.E.

Materials Research Society
10 国際会議録 LOW-ENERGY ACCELERATED-ION DOPING OF Si DURING MOLECULAR BEAM EPITAXY:INCORPORATION PROBABILITIES, DEPTH DISTRIBUTION, AND ELECTRICAL PROPERTIES

Markert C. L., Knall J., Noel -P. J., Hasan -A. M., Greene E. J., Sundgren -E. J.

Kluwer Academic Publishers
5 国際会議録 Physics of Glow Discharge Plasma/Surface Interactions During Thin Film Growth

Sundgren J-E.

Plenum Press
11 国際会議録 SURFACE SEGREGATION OF BORON DURING Si-MBE GROWTH

Sardela, M.R., Ni, W.-X., Ekberg, J.O., Sundgren, J.-E., Hansson, G.V.

Materials Research Society
6 国際会議録 *FORMATION OF DEFECTS DURING ION-ASSISTED GROWTH OF THIN FILMS FROM THE VAPOR PHASE

Sundgren, J-E., Hultman, L., Hakansson, G., Birch, J., Petrov, I.

Materials Research Society
12 国際会議録 EXPERIMENTAL AND MODEL STUDIES OF DOPANT SEGREGATION DURING GROWTH OF SILICON FILMS BY MOLECULAR BEAM EPITAXY

Ni, W.-X., Hansson, G.V., Sundgren, J.-E., Markert, L.C., Greene, J.E.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12