SMOOTH SILICIDE FORMATION BY ION BEAM MIXING OF Ti/Si-LAYERS
- 著者名:
- 掲載資料名:
- Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 74
- 発行年:
- 1987
- 開始ページ:
- 443
- 終了ページ:
- 448
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837401 [0931837405]
- 言語:
- 英語
- 請求記号:
- M23500/74
- 資料種別:
- 国際会議録
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4
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CoSi2 PRECIPITATE COARSENING DURING FORMATION OF BURIED EPITAXIAL CoSi2 LAYERS BY ION BEAM SYNTHESIS
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