ROLE OF IMPLANT ENERGY ON DEFECT STRUCTURES FOR PHOSPHOROUS IMPLATED SILICON

ROLE OF IMPLANT ENERGY ON DEFECT STRUCTURES FOR PHOSPHOROUS IMPLATED SILICON

著者名:

掲載資料名:

Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

71

発行年:

1986

開始ページ:

191

終了ページ:

196

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837371 [0931837375]

言語:

英語

請求記号:

M23500/71

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015557
シリーズID:	PA00000011
会議名:	Symposium on materials issues in silicon integrated circuit processing
回次:	1986
会議開催地:	Palo Alto, CA, USA
会議開催年:	1986.04.15-1986.04.18

類似資料:

1 国際会議録 DEFECT STRUCTURES GENERATED BY BURIED AMORPHOUS LAYER REGROWTH IN <10> ARSENIC IMPLANTED SILICON Jones, K.S., Prussin, S. Materials Research Society	7 国際会議録 (311) Defect Formation and Evolution for Si and B Implants Law, M.E., Jones, K.S. Electrochemical Society
2 国際会議録 THE GROWTH MECHANISM OF DISLOCATION LOOPS IN ARSENIC IMPLANTED SILICON. JONES,K.S., PRUSSIN,S., WEBER,E.R. Trans Tech Publications	8 国際会議録 LOW-ENERGY IMPLANTATION OF Si AND Sn INTO GaAs Rubart, W.S., Jones, K.S., Seiberling, L., Sadana, D.K. Materials Research Society
3 国際会議録 POINT DEFECT DETECTOR STUDIES OF Ge + IMPLANTED SILICON UPON OXIDATION Meng, H. L., Prussin, S., Jones, K. S. Materials Research Society	9 国際会議録 Effect of Arsenic on Extended Defect Evolution in Silicon Brindos, R., Jones, K.S., Law, M.E Materials Research Society
4 国際会議録 POINT DEFECT DETECTOR STUDIES OF OXIDIZED SILICON Meng, H. L., Jones, K. S., Prussin, S. Materials Research Society	10 国際会議録 Evidence of Two Sources of Interstitials for TED in Boron Implanted Silicon Jones, K.S., Liu, J., Zhang, L. Electrochemical Society
5 国際会議録 THE EFFECT OF IMPLANT SPECIES ON THE STABILITY OF ION IMPLANTATION DAMAGE Jones, K. S., Prussin, S., Venables, D. Materials Research Society	11 国際会議録 The Role of Stress on the Shape of the Amorphous-Crystalline Interface and Mask-Edge Defect Formation in Ion-Implanted Silicon Ross, Carrie E., Jones, Kevin S. Materials Research Society
6 国際会議録 Effect of Implant Energy on Silicon Defect Evolution Desroches, J., Krishnamoorthy, V., Jones, K. S., Jasper, C. MRS - Materials Research Society	12 国際会議録 Defect Evolution From Low Energy, Amorphizing, Germanium Implants on Silicon Gutierrez, Andres F., Jones, Kevin S., Downey, Daniel F. Materials Research Society

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