CHARACTERIZATION OF REACTIVELY SPUTTERED TITANIUM CARBIDE FILMS BY ANALYTICAL ELECTRON MICROSCOPY
- 著者名:
- 掲載資料名:
- Materials problem solving with the transmission electron microscope : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 62
- 発行年:
- 1986
- 開始ページ:
- 421
- 終了ページ:
- 426
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837272 [0931837278]
- 言語:
- 英語
- 請求記号:
- M23500/62
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Trans Tech Publications |
Materials Research Society | |
North-Holland |
9
国際会議録
Preparation and characterization of silicon carbide thin films synthesized by rf reactive sputtering
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
10
国際会議録
HETEROEPITAXIAL GROWTH AND CHARACTERIZATION OF TITANIUM FILMS ON ALPHA (6H) SILICON CARBIDE
Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
12
国際会議録
A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition
Trans Tech Publications |