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CHARACTERIZATION OF SPUTTER DEPISITED Al-NITRIDE AND Al-OXIDE BYX-RAY PHOTOELECTRON LOSS SPECTROSCOPY

著者名:
掲載資料名:
Defect properties and processing of high-technology nonmetallic materials : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
60
発行年:
1986
開始ページ:
379
終了ページ:
386
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837258 [0931837251]
言語:
英語
請求記号:
M23500/60
資料種別:
国際会議録

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