FIRST PHASE NUCLEATION AND GROWTH OF TITANIUM DISILICIDE WITH AN EMPHASIS ON THE INFLUENCE OF OXYGEN

FIRST PHASE NUCLEATION AND GROWTH OF TITANIUM DISILICIDE WITH AN EMPHASIS ON THE INFLUENCE OF OXYGEN

著者名:

掲載資料名:

Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

54

発行年:

1985

開始ページ:

37

終了ページ:

42

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837197 [0931837197]

言語:

英語

請求記号:

M23500/54

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015540
シリーズID:	PA00000011
会議名:	Symposium on thin films
回次:	1985
会議開催地:	Boston, MA, USA
会議開催年:	1985.12.02-1985.12.06

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