Blank Cover Image

* PROCESS AND DEVICE CONSIDERATIONS FOR SMALL GRAIN POLYSILICON TRANSISTORS

著者名:
掲載資料名:
Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
53
発行年:
1985
開始ページ:
419
終了ページ:
428
総ページ数:
10
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837180 [0931837189]
言語:
英語
請求記号:
M23500/53
資料種別:
国際会議録

類似資料:

1 国際会議録 N-CHANNEL AND P-CHANNEL LPCVD POLYSILICON MOSFET’S AND EFFECTS OF GRAIN BOUNDARY PASSIVATION

Shichijo, H., Malhi, S. D. S., Chatterjee, P. K., Shah, A. H., Pollack, G. P., Richardson, W. H., Shah, R. R., Douglas, …

North Holland
7 国際会議録 Analysis and modeling of submicron drain-offset polysilicon thin film transistors (TFTs)

J. Damiano, Jr., L. Jung, S.K. Banerjee, S. Batra

Society of Photo-optical Instrumentation Engineers
2 国際会議録 COMPARISON OF STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF SOLID-PHASE EPITANIAL FILMS RECRYSTALLIZED BY RAPID THERMAL ANNEALING AND FURNACE ANNEALING

Sundaresan, R., Chang, P.-H., Malhi, S.D.S., Lam, H.W.

Materials Research Society
8 国際会議録 Applications of silicon-germanium-carbon in MOS and bipolar transistors (Invited Paper)

Banerjee,S.K.

SPIE-The International Society for Optical Engineering
3 国際会議録 Characterization of Polysilicon Thin-Film Transistor Gate Dielectrics

Zaman, R.J., Damiano, J., Jr., Batra, S., Manning, M., Banerjee, S.K.

Electrochemical Society
9 国際会議録 Theory of mosfet operation in small-grain polysilicon

Depp, S.W., Huth, B.G., Juliana, A., Koepcke, R.W.

North-Holland
4 国際会議録 POLYSILICON GRAIN GROWTH BY RAPID ISOTHERMAL ANNEALING

Pinizzotto, R. F., Clark, F. Y., Malhi, S. D. S., Shah, R. R.

North Holland
10 国際会議録 CONTROL OF POLYSILICON EMITTER BIPOLAR TRANSISTOR CHARACTERISTICS BY RAPID THERMAL OR FURNACE ANNEAL OF THE POLYSILICON/SILICON INTERFACE

Bhattacharya, S., Lobo, M., Jung, L., Banerjee, S., Reuss, R., Batra, S., Park, K., Hu, G.

Materials Research Society
5 国際会議録 COMPARATIVE STUDIES OF FURNACE AND RAPID THERMAL PASSIVATION FOR ACCUMULATION AND INVERSION MODE POLYSILICON-ON-OXIDE MOSFETS

Batra, S., Park, K., Banerjee, S., Sundaresan, R.

Materials Research Society
11 国際会議録 THE INTERFACE STRUCTURE OF GRAIN BOUNDARIES IN POLYSILICON

Johnson, S. M., Yoo, K. C., Lin, H. C., Rosemeier, R. G., Soltani, P.

North-Holland
6 国際会議録 Beam recrystallized silicon-on-insulator devices

Lam, H.W.

North Holland
12 国際会議録 SECONDARY GRAIN GROWTH IN HEAVILY DOPED POLYSILICON DURING RAPID THERMAL ANNEALING

Batra, S., Park, K., Lobo, M., Banerjee, S.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12